• Ebpay

      Reticle Cabinet
      Reticle Cabinet functions as photomask pod storage equipment with an purging function. It is designed to store photomask pods for IC production in batches and ensures the quality of photomasks by filling them with pure gas.
      For the first time in China, MeetFuture's Reticle Cabinet has achieved the ability to reduce the humidity of the photomask pod to below RH10% in a very short time, even with a very small flow rate.
      Feature Highlights:

      User-friendly man-machine interface

      Stable system integration

      Drawer design for mass storage

      High-speed continuous purge

      Compatibility with multiple EAP communications

      Software Description
      Reticle Cabinet Storage Cabinet Software System
      Reticle Cabinet Software
      The software provides real-time feedback on materials information, purge time, and purging stage for the current materials . It also monitors the flow and generates alarms accordingly.

      Feature Highlights:
      ▪ Supports touchscreen control
      ▪ Allows dynamic configuration of customer parameters
      ▪ Supports docking with EAP and MF FabScope systems
      Important Parameters
      Technical IndicatorsParameters

      Dimensions (L*W*H)

      2217mm*1058mm*1913mm

      Weight (full/empty）

      630kg&460kg

      Self （Number of positions）

      		84

      Storing POD Types

      SMIF POD RSP3 RSP1

      RFID read rate

      ≥99.999%

      power supply

      220V，50Hz，2A


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